Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared-Reference-Cited by-同舟云学术

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Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared

Published:2014-03-07 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Rissanen A.,Mannila R.,Tuohiniemi M.,Akujärvi A.,Antila J.

Publisher

SPIE

Reference5 articles.

1. MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

2. MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT;Antila,2010

3. Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer;Antila,2012

4. Robustness and reliability of MOEMS for miniature spectrometers;Rissanen,2013

5. Hernandez, G., [Fabry-Perot Interferometers], Cambridge University Press, (1988).

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