Precise interferometric measurements at single-crystal silicon yielding thermal expansion coefficients from 12° to 28°C and compressibility-Reference-Cited by-同舟云学术

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Precise interferometric measurements at single-crystal silicon yielding thermal expansion coefficients from 12° to 28°C and compressibility

Published:2001-10-22 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Schoedel Rene,Boensch Gerhard

Publisher

SPIE

Cited by 34 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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