5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

Published:2009-08-20 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Advances in X-Ray/EUV Optics and Components IV
language:
Short-container-title:

Author:

Voronov Dmitriy L.,Anderson Erik H.,Cambie Rossana,Salmassi Farhad,Gullikson Eric M.,Yashchuk Valeriy V.,Padmore Howard A.,Ahn Minseung,Chang Chih-Hao,Heilmann Ralf K.,Schattenburg Mark L.

Publisher

SPIE

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Blazed Silicon Gratings for Soft X-Ray and Extreme Ultraviolet Radiation: the Effect of Groove Profile Shape and Random Roughness on the Diffraction Efficiency;Technical Physics;2023-12

2. Optimization of Triangular-Profiled Si-Grating Fabrication Technology for EUV and SXR Applications;Technical Physics;2023-12

3. Blazed Diffraction Gratings on Si—First Results;Technical Physics;2023-12

4. Silicon Echelles for Soft X-Ray and Extreme UV Radiation: Influence of the Camber of the Reflective Facet on the Diffraction Efficiency;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12

5. Fabrication and Soft-X-Ray and EUV Range Testing of Au- and Multilayer Mo/Si-Coated Diffraction Gratings with High-Order Blaze;Bulletin of the Lebedev Physics Institute;2023-08

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP