Accounting for mask topography effects in source-mask optimization for advanced nodes-Reference-Cited by-同舟云学术

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Accounting for mask topography effects in source-mask optimization for advanced nodes

Published:2011-03-17 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Coskun Tamer H.,Dai Huixiong,Huang Hsu-Ting,Kamat Vishnu,Ngai Chris

Publisher

SPIE

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