Author:
Yeung Michael S.,Lee Derek,Lee Robert S.,Neureuther Andrew R.
Cited by
41 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 三维掩模光刻成像快速计算模型;Acta Optica Sinica;2023
2. 先进计算光刻;Laser & Optoelectronics Progress;2022
3. Fast EUV lithography simulation using convolutional neural network;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-09-24
4. Fast 3D lithography simulation by convolutional neural network;Design-Process-Technology Co-optimization XV;2021-02-22
5. Image-based pupil plane characterization via a space-domain basis;Journal of Micro/Nanolithography, MEMS, and MOEMS;2017-06-19