Improvements in CaF 2 material properties for next-generation microlithography applications
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Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Comparative study of optical and dosimetric properties of Mn-doped CaF2;Japanese Journal of Applied Physics;2023-12-15
2. Time-resolved imaging of CaF2 poly-crystal response following 355 nm nanosecond laser irradiation;Journal of the Optical Society of America B;2021-11-15
3. Laser-induced fluorescence and its effect on the damage resistance of fluoride-containing phosphate-based glasses;Ceramics International;2021-05
4. Nanosecond laser-induced surface damage and its mechanism of CaF2 optical window at 248 nm KrF excimer laser;Scientific Reports;2020-03-26
5. Nanosecond laser-induced surface damage and material failure mechanism of single crystal CaF2 (111) at 355 nm;Applied Surface Science;2019-06
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