Tapered microelectrode array system for dielectrophoretically filtration: fabrication, characterization, and simulation study-Reference-Cited by-同舟云学术

Tapered microelectrode array system for dielectrophoretically filtration: fabrication, characterization, and simulation study

Published:2017-12-23 Issue:04 Volume:16 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Buyong Muhamad Ramdzan¹,Larki Farhad²,Takamura Yuzuru³,Majlis Burhanuddin Yeop¹

Affiliation:

1. Universiti Kebangsaan Malaysia (UKM), Institute of Microengineering and Nanoelectronic (IMEN), Bangi

2. Isfahan University of Technology, Department of Physics, Isfahan

3. Japan Advanced Institute of Science and Technology (JAIST), School of Materials Science, Department

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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