1. C. A. Mack, “Optimum stepper performance through image manipulation,”Proc. KTI Microelectronics Seminar Interface ’89, pp. 209–215, San Diego, CA (Nov. 1989).
2. D. L. Fehrs, H. B. Lovering, and R. T. Scruton, “Illuminator modification of an optical aligner,”Proc. KTI Microelectronics Seminar Interface ’89, pp. 217–230, San Diego, CA (Nov. 1989).
3. Subhalf-micron lithography system with phase-shifting effect
4. New imaging technique for 64M-DRAM
5. Resolution improvement with annular illumination