Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns-Reference-Cited by-同舟云学术

Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

Published:2016-03-04 Issue:2 Volume:15 Page:021206
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Shibuya Masato¹,Takada Akira²,Nakashima Toshiharu³

Affiliation:

1. Tokyo Polytechnic University, 1583 Iiyama, Atsugi-shi, Kanagawa 243-0297, Japan

2. Topcon Corporation, 75-1, Hasunuma-cho, Itabashi-ku, Tokyo 174-8580, Japan

3. Nikon Corporation, Naka-cho, Oomiya-ku, Saitama 330-0845, Japan

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Theory of high-NA imaging in homogeneous thin films

2. Radiometric consistency in source specifications for lithography

3. Calculation and uses of the lithographic aerial image

4. Methods for benchmarking photolithography simulators

5. Methods for benchmarking photolithography simulators: part II

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Consistent scalar imaging theory;Progress in Optics;2024

2. Cross‐Scale Topography Achieved by MOPL with Positive Photoresist to Regulate the Cell Behavior;Small;2023-08-17

3. Lens Optics Brilliant Forever —Introducing New Theories Related to Imaging—;2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR);2022-07-31

4. Conservation of energy between pupil and image for point spread function;Optik;2022-01

5. Compound-Specific Radiocarbon Analysis of Organic Compounds from Mount Fuji Proximal Lake (Lake Kawaguchi) Sediment, Central Japan;Radiocarbon;2020-01-23