Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer-Reference-Cited by-同舟云学术

Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer

Published:2016-07-19 Issue:3 Volume:15 Page:035001
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Verma Payal¹,Zaman Khan Khamar²,Khonina Svetlana Nikolaevna¹,Kazanskiy Nikolay Lvovich¹,Gopal Ram³

Affiliation:

1. Samara National Research University, Department of Technical Cybernetics, 34, Moskovskoye Shosse, Samara 443086, Russia

2. Semiconductor Technology and Applied Research Centre, MEMS Design, Bangalore, Karnataka 560016, India

3. Council of Scientific and Industrial Research-Central Electronics Engineering Research Institute, MEMS and Microsensors Group, Pilani, Rajasthan 333031, India

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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