Modeling and fabrication of evanescent waveguide-based optical sensor for sensitivity enhancement using silicon oxynitride technology-Reference-Cited by-同舟云学术

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Modeling and fabrication of evanescent waveguide-based optical sensor for sensitivity enhancement using silicon oxynitride technology

Published:2013-07-01 Issue:7 Volume:52 Page:077101
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Dutta Aradhana,Deka Bidyut,Sahu Partha Pratim

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

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