Microstructure- and composition-related characteristics of LaF3 thin films at 193nm
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Vacuum ultraviolet thin films 1: Optical constants of BaF_2, CaF_2, LaF_3, MgF_2, Al_2O_3, HfO_2, and SiO_2 thin films
2. Materials for optical coatings in the ultraviolet
3. Refractive index of some oxide and fluoride coating materials
4. Vacuum ultraviolet loss in magnesium fluoride films
5. Optical properties of some solids in the vacuum ultraviolet
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