Evaluation of hybrid polymers for high-precision manufacturing of 3D optical interconnects by two-photon absorption lithography
Author:
Affiliation:
1. micro resist technology GmbH (Germany)
2. Multiphoton Optics GmbH (Germany)
Publisher
SPIE
Reference12 articles.
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2. UV-curable hybrid polymers (ORMOCER®s) for micro optics based on a license granted by the Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung in Deutschland e.V.
3. Applications of hybrid organic–inorganic nanocomposites
4. Organic-inorganic-hybrid-polymer microlens arrays with tailored optical characteristics and multi-focal properties
5. B. Stender, Diploma Thesis, Julius-Maximilian University, Würzburg (2010).
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Hybrid lithography approach for single mode polymeric waveguides and out-of-plane coupling mirrors;2022 IEEE 72nd Electronic Components and Technology Conference (ECTC);2022-05
2. Hybrid Polymers for Conventional and Additive Manufacturing of Microoptical Elements;Springer Series in Optical Sciences;2020-11-22
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