Thermal expansion mismatch resonant infrared sensor and array-Reference-Cited by-同舟云学术

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Thermal expansion mismatch resonant infrared sensor and array

Published:2015-08-07 Issue:8 Volume:54 Page:087102
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Zhang Xia¹,Zhang Dacheng²

Affiliation:

1. Communication University of China, Department of Photo-electronics, No. 1 Dingfuzhuang East Street, Chaoyang District, Beijing 100024, China

2. Peking University, Institute of Micro-Nanoelectronics, No. 5 Yiheyuan Road, Haidian District, Beijing 100871, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference12 articles.

1. Uncooled Infrared Detectors Using Gallium Nitride on Silicon Micromechanical Resonators

2. Resonator sensors-a review

3. Silicon resonant microsensor;Martin,1987

4. Optical study of undoped, B or P-doped polysilicon

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research on frequency measurement of the uncooled infrared MEMS resonance sensor;Optical Sensing and Detection VIII;2024-06-20

2. Analysis of driving force and exciting voltage for a bi-material infrared resonator;Nanophotonics Australasia 2017;2018-01-02

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