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2. 2013 Mask Industry Survey;Malloy,2013
3. Distributed Computing in Mask Data Preparation for 45nm Node and Below;Zhang,2006
4. Study of Data I/O Performance on Distributed Disk System in Mask Data Preparation;Ohara,2010
5. Metrics to Assess Fracture Quality for Variable Shaped Beam Lithography;Bloecker,2006