Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry-Reference-Cited by-同舟云学术

Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry

Published:2016-01-19 Issue:1 Volume:55 Page:014103
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Montonen Risto¹,Kassamakov Ivan¹,Hæggström Edward²,Österberg Kenneth¹

Affiliation:

1. University of Helsinki, Helsinki Institute of Physics, Gustaf Hällströmin katu 2, P.O. Box 64, FI-00014 Helsinki, FinlandbUniversity of Helsinki, Department of Physics, Gustaf Hällströmin katu 2, P.O. Box 64, FI-00014 Helsinki, Finland

2. University of Helsinki, Department of Physics, Gustaf Hällströmin katu 2, P.O. Box 64, FI-00014 Helsinki, Finland

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference24 articles.

1. Machining and characterizing X-band RF-structures for CLIC;Atieh,2011

2. Study of the machining and assembly tolerances for the CLIC accelerating structures;Zennaro,2016

3. Ultrahigh resolution Fourier domain optical coherence tomography

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