1. Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen 76344, GermanybUniversity of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Materials Processing, Georges-Koehler-Allee 102, Freiburg 79110, Germany
2. University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Materials Processing, Georges-Koehler-Allee 102, Freiburg 79110, Germany
3. University of Hanover, Institute of Transport and Automation Technology (ITA), An der Universitaet 2, Garbsen 30823, Germany
4. Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen 76344, Germany
5. University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Materials Processing, Georges-Koehler-Allee 102, Freiburg 79110, GermanydKarlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen 76344, Germany