Author:
Su S. Z.,Rodríguez Ainhara,Olaizola Santiago M.,Peng C. S.,Tan C.,Verevkin Yury K.,Berthoud Thierry,Tisserand Stéphane
Cited by
2 articles.
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1. Double-beam laser interference lithography based on optical field modulation;9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology;2019-02-06
2. Fabrication of moth-eye structures on silicon by direct six-beam laser interference lithography;Journal of Applied Physics;2014-05-28