Topography measurements of high NA aspherical microlenses by digital holographic microscopy with spherical illumination-Reference-Cited by-同舟云学术

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Topography measurements of high NA aspherical microlenses by digital holographic microscopy with spherical illumination

Published:2017-06-26 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Optical Measurement Systems for Industrial Inspection X
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Author:

Józwik Michal¹,Mikuła Marta²,Kozacki Tomasz¹,Kostencka Julianna¹,Gorecki Christophe³

Affiliation:

1. Warsaw Univ. of Technology (Poland)

2. Warsaw Univ of Technology (Poland)

3. Univ. Bourgogne-Comté, FEMTO-ST Institute (France)

Publisher

SPIE

Reference18 articles.

1. High-numerical-aperture microlens shape measurement with digital holographic microscopy

2. Digital holography with multidirectional illumination by LCoS SLM for topography measurement of high gradient reflective microstructures

3. Twyman-Green interferometer for testing microspheres

4. Design, fabrication and testing of microlens arrays for sensors and microsystems;Nussbaum;Appl. Opt.,1997

5. Combined Twyman–Green and Mach–Zehnder interferometer for microlens testing

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1. Spherical wave illumination scanning digital holographic profilometry;Optics Express;2024-01-03

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