Research on auto-centering device in surface defects evaluation system of large spherical optics

Author:

Zhang Yihui1,Yang Yongying1,Wu Fan1,Chai Huiting1,Yan Kai1,Zhou Lin1,Li Yang1,Liu Dong1,Bai Jian1,Shen Yibing1,Cao Pin2

Affiliation:

1. Zhejiang Univ. (China)

2. Hangzhou Zernike Optical Technology Co., Ltd. (China)

Publisher

SPIE

Reference12 articles.

1. Organization I S. ISO 10110-7[S], Optics and photonics-Preparation of drawings for optical elements and system-Part 7. Geneva: International Standard Organization, 2008.

2. Detection System for Sub-micrometer Defects of a Photo-mask Using On-axis Interference between Reflected and Scattered Lights

3. Fast mapping of absorbing defects in optical materials by full-field photothermal reflectance microscopy..;June,2013

4. Nondestructive defect inspection for LCDs using optical coherence tomography

5. Mapping and inspection of damage and artifacts in large-scale optics.;Rainer,1997

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Spherical optical surface defects digitizing evaluation system;Optical Manufacturing and Testing XII;2018-09-14

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