Effects of mid-spatial frequency errors of optical surface on the penumbra width of photolithography relay lens-Reference-Cited by-同舟云学术

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Effects of mid-spatial frequency errors of optical surface on the penumbra width of photolithography relay lens

Published:2023-12-18 Issue: Volume: Page:
ISSN:
Container-title:AOPC 2023: Optical Design and Manufacturing
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Author:

Liu Jiahong,Zhang Fang,Huang Huijie

Publisher

SPIE

Reference13 articles.

1. Research progress on illumination system technology for step-and-scan projection lithography tools[J];Jiahong;Laser & Optoelectronics Progress,2022

2. Effects of mid-spatial frequency surface errors on the illumination field uniformity of off-axis illumination[J];Shuang;Chinese Journal of Lasers,2020

3. Tolerancing the impact of mid-spatial frequency surface errors of lenses on distortion and image homogeneity;Achilles,2015

4. Method of edge control on surface error in aspherical optics (Invited)[J];Lunzhe;Infrared and Laser Engineering,2022

5. Grinding aspheric and freeform micro-optical molds[J];Tohme,2007

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