Inhibiting device degradation induced by surface damages during top-down fabrication of semiconductor devices with micro/nano-scale pillars and holes
Author:
Affiliation:
1. Univ. of California, Davis (United States)
2. Univ. of California, Santa Cruz (United States)
Publisher
SPIE
Reference20 articles.
1. Da, Y., Xuan, Y. M., Role of surface recombination in affecting the efficiency of nanostructured thin-film solar cells. Opt Express 2013, 21 (22), A1065–A1077.
2. Logeeswaran, V., Oh, J., Nayak, A. P., Katzenmeyer, A. M., Gilchrist, K. H., Grego, S., Kobayashi, N. P., Wang, S.-Y., Talin, A. A., Dhar, N. K., A perspective on nanowire photodetectors: Current status, future challenges, and opportunities. Ieee J Sel Top Quant 2011, 17 (4), 1002–1032.
3. Achieving an Accurate Surface Profile of a Photonic Crystal for Near-Unity Solar Absorption in a Super Thin-Film Architecture
4. Harvesting and transferring vertical pillar arrays of single-crystal semiconductor devices to arbitrary substrates;Logeeswaran,2010
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