1. Cramming more components onto integrated circuits;Moore,1965
2. Optical Lithography
3. A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors;Auth,2012
4. Resolution Enhancement Techniques in Optical Lithography
5. New process models for OPC at sub-90-nm nodes;Granik,2003