Toward reliable and repeatable automated STEM-EDS metrology with high throughput-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Toward reliable and repeatable automated STEM-EDS metrology with high throughput

Published:2018-03-13 Issue: Volume: Page:
ISSN:
Container-title:Metrology, Inspection, and Process Control for Microlithography XXXII
language:
Short-container-title:

Author:

Zhong Zhenxin,Donald Jason,Dutrow Gavin,Roller Justin,Ugurlu Ozan,Verheijen Martin,Bidiuk Oleksii

Publisher

SPIE

Reference10 articles.

1. [Metrology and Diagnostic Techniques for Nanoelectronics];Ma,2017

2. High-volume process monitoring of FEOL 22nm FinFET structures using an automated STEM;Ugurlu,2013

3. Automated Workflows for Process Control and Defect Analysis;Ugurlu,2016

4. Nanoscale chemical compositional analysis with an innovative S/TEM-EDX system;Schlossmacher,2010

5. Performance Evaluation of Dual Bruker XFlash6 | 100 EDS Detector Integrated in FEI Themis With Analytical Objective Pole Piece

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-03-22

2. Inline metrology of high aspect ratio hole tilt using small-angle x-ray scattering;Metrology, Inspection, and Process Control XXXVI;2022-05-26

3. 3D analysis of high-aspect ratio features in 3D-NAND;Metrology, Inspection, and Process Control for Microlithography XXXIV;2020-03-20

4. Research Update: Electron beam-based metrology after CMOS;APL Materials;2018-07

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP