Combinational optical rule check on hotspot detection-Reference-Cited by-同舟云学术

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Combinational optical rule check on hotspot detection

Published:2018-03-28 Issue: Volume: Page:
ISSN:
Container-title:Design-Process-Technology Co-optimization for Manufacturability XII
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Author:

Shang Shumay,Zhang Hongxin,Wu Rui,Yin Lianghong,Wei Alex,Sun Yuyang,Gao Shaowen,Ma Yuansheng

Publisher

SPIE

Reference1 articles.

1. Failure prediction across process window for robust OPC;Shang,2003

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Photolithography Hotspot Detection Based on Deep Learning LHD Model;2023 International Workshop on Advanced Patterning Solutions (IWAPS);2023-10-26

2. Applying machine learning methods to accelerate advanced process node yield ramp;Design-Process-Technology Co-optimization XV;2021-02-22

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