1. Understanding and Using Cost of Ownership;Wright,1997
2. Low-K dielectric cost modeling;Korczynski,1997
3. Optical Lithography Cost of Ownership (COO) - Final Report for LITG501;Muzio,2000
4. EUVL: Challenges to Manufacturing Insertion
5. Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control;Gunay-Demirkol,2016