Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Bodermann, B. et al.,“Metrology of small structures for the manufacturing of electronic and optical devices,” EMRP 2010 Joint Research Project Protocol (unpublished document).
2. Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy
3. AFM type ‘XE-3DM’ of the Park Systems Corp.,” http://www.parkafm.com/.
4. Method for imaging sidewalls by atomic force microscopy
Cited by
33 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献