1. Phase Defect Observation Using a EUV Microscope;Hamamoto,2006
2. Zernike Phase Contrast Microscope for EUV mask inspection;Wang,2014
3. The influence of phase defect characteristics on scattered light images in actinic dark-field inspection;Takagi,2014
4. Quantitative evaluation of mask phase defects from through-focus EUV aerial images;Mochi,2011
5. Phase-contrast versus off-axis illumination: is a more complex microscope always more powerful?