Thermochemical laser writing of chromium grayscale masks and their application for fabrication of multilevel diffractive optical elements

Author:

Kuts Roman I.,Korolkov Victor P.,Sametov Alexander R.,Cherkashin Vadim V.,Zaitseva Daria E.,Golubtsov Sergey K.

Publisher

SPIE

Reference14 articles.

1. Half-tone optical storage ina-Si films

2. Creating Direct-write Grayscale Photomasks with Bimetallic Thin Film Thermal Resists;Chapman,2003

3. Grayscale photomask fabricated by laser direct writing in metallic nano-films

4. Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs;Korolkov,1999

5. Fabrication of gray-scale masks and diffractive optical elements with LDW glass;Korolkov,2001

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