A portable device for calibration of autocollimators with nanoradian precision-Reference-Cited by-同舟云学术

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A portable device for calibration of autocollimators with nanoradian precision

Published:2017-09-07 Issue: Volume: Page:
ISSN:
Container-title:Advances in Metrology for X-Ray and EUV Optics VII
language:
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Author:

Yandayan Tanfer

Publisher

SPIE

Reference29 articles.

1. JRP SIB58 Angles, Angle Metrology website, , (5 July 2017).

2. Measurement of angle in engineering;Evans,1986

3. Autocollimators, , (5 July 2017).

4. The Nanometer Optical Component Measuring machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY;Siewert,2004

5. Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High precision (Advanced) angle metrology: pushing the limits for nanoradian uncertainty demands;Journal of Physics: Conference Series;2018-08

2. Recent developments in nanoradian-angle metrology;Advances in Metrology for X-Ray and EUV Optics VII;2017-09-07

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