Study on mechanism and process of ion beam machining on high-precision large optical surfaces
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Publisher
SPIE
Reference14 articles.
1. Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook
2. Ion beam figuring of high-slope surfaces based on figure error compensation algorithm
3. Large area smoothing of surfaces by ion bombardment: fundamentals and applications;Frost,2009
4. Low energy ion beam smoothening of artificially synthesized single crystal diamond chips with initial surface roughness of 0.08–0.4nm rms
5. The morphology of amorphous SiO2 surfaces during low energy ion sputtering;Keller,2009
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