The research on material removal characteristic of reactive ion beam figuring for optics mirrors-Reference-Cited by-同舟云学术

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The research on material removal characteristic of reactive ion beam figuring for optics mirrors

Published:2017-10-24 Issue: Volume: Page:
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Container-title:AOPC 2017: Optoelectronics and Micro/Nano-Optics
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Author:

Zhang Zhenpeng,Xie Xuhui,Zhou Lin,Lu Ying,Dai Zuocai

Publisher

SPIE

Reference12 articles.

1. Controlled Figuring of Optical Surfaces by Energetic Ionic Beams

2. Ion beam figuring system in NUDT;Zhou,2007

3. Design of ion beam figuring machine for optics mirrors;Jiao;Key Engineering Materials,2008

4. Ion beam figuring technology;Dai;Journal of Applied Optics.,2011

5. Reactive ion beam etching-a fabrication process for the figuring of precision aspheric optical surfaces in fused silica;Flamm,1999

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