Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication-Reference-Cited by-同舟云学术

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Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication

Published:2013-09-25 Issue:4 Volume:12 Page:041203
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Kumar Avinash,Gupta Ankur,Kant Rishi,Akhtar Syed Nadeem,Tiwari Nachiketa,Ramkumar Janakrajan,Bhattacharya Shantanu

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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