<title>Improved estimates of the range of errors on photomasks using measured values of skewness and kurtosis

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Improved estimates of the range of errors on photomasks using measured values of skewness and kurtosis

Published:1995-10-06 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Hamaker Henry Chris

Publisher

SPIE

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An optimization-based method for designing modular systems that traverse dynamic s-Pareto frontiers;Structural and Multidisciplinary Optimization;2013-04-21

2. Propagating Skewness and Kurtosis Through Engineering Models for Low-Cost, Meaningful, Nondeterministic Design;Journal of Mechanical Design;2012-09-28

3. Skewness and Kurtosis Risks of Quality Control in Overlay Inspection;Japanese Journal of Applied Physics;2010-06-21

4. A Method of Estimating the Process Capability Index from the First Four Moments of Non-normal Data;Quality and Reliability Engineering International;2004

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