Author:
Wan Zhenzhen,Liu Limei,Kan Huan,Wan Qijian,Hu Xinyi,Liu Zhengfang,Du Chunshan
Reference1 articles.
1. Using pattern based layout comparison for a quick analysis of design changes;Lucas,2018
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. SONR based layout decomposition and applications;2022 International Workshop on Advanced Patterning Solutions (IWAPS);2022-10-21
2. Advanced process and electron device technology;Tsinghua Science and Technology;2022-06