Design and fabrication considerations of EUVL collectors for HVM-Reference-Cited by-同舟云学术

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Design and fabrication considerations of EUVL collectors for HVM

Published:2009-03-13 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies
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Author:

Bianucci G.,Cassol G. L.,Kools J.,Prea M.,Salmaso G.,Valsecchi G.,Zocchi F. E.,Bolshukhin D.,Schürmann M.,Schriever G.,Mader A.,Zink P.

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. EUV Optics;Tailored Light 2;2023-10-05

2. Tidal disruption events on to stellar black holes in triples;Monthly Notices of the Royal Astronomical Society;2019-08-12

3. On the photometric signature of fast rotators;Monthly Notices of the Royal Astronomical Society;2019-07-01

4. Massive binary star mergers in galactic nuclei: implications for blue stragglers, binary S-stars, and gravitational waves;Monthly Notices of the Royal Astronomical Society;2019-06-21

5. Low CoO grazing incidence collectors for EUVL HVM;SPIE Proceedings;2012-03-29

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