Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters-Reference-Cited by-同舟云学术

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Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters

Published:2016-03-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Othman Muhammad A.,Sabry Yasser M.,Sadek Mohamed,Nassar Ismail M.,Khalil Diaa A.

Publisher

SPIE

Reference15 articles.

1. Electrostatic micro torsion mirrors for an optical switch matrix

2. Miniaturized time-scanning Fourier transform spectrometer based on silicon technology

3. Characterization of MEMS FTIR spectrometer;Khalil,2011

4. Monolithic silicon-micromachined free-space optical interferometers onchip

5. Optical characterization technique for MEMS comb-drive resonators;Sabry,2009

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modal analysis of TE and TM excitations in a metallic slotted micromirror;Journal of the Optical Society of America B;2019-02-08

2. Transmission-enabled fiber Fabry–Perot cavity based on a deeply etched slotted micromirror;Applied Optics;2018-05-30

3. MEMS tunable-finesse slotted micromirror resonator;MOEMS and Miniaturized Systems XVII;2018-02-22

4. Deeply-Etched MEMS Slotted Micromirrors With Controlled Transmittance;IEEE Journal of Quantum Electronics;2017-12

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