<title>Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films

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Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films

Published:2001-08-10 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Bortchagovsky Eugene G.,Getsko O. M.

Publisher

SPIE

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Exhibition of a film’s resonances in ellipsometric spectra and the Berreman effect;Applied Optics;2023-01-23

2. Direct synthesized graphene-like film on SiO2: Mechanical and optical properties;Semiconductor Physics Quantum Electronics and Optoelectronics;2016-12-05

3. Effect of free surface roughness on the apparent glass transition temperature in thin polymer films measured by ellipsometry;Review of Scientific Instruments;2014-12

4. Method for determination of the dielectric function of a thin absorbing film on variable substrates from transmission spectra;Applied Optics;2003-12-01

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