Design and wafer-level replication of a freeform curvature for polymer-based electrostatic out-of-plane actuators
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Published:2013-11-26
Issue:4
Volume:12
Page:041205
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ISSN:1932-5150
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Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
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language:en
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Short-container-title:J. Micro/Nanolith. MEMS MOEMS
Author:
Lange Nicolas,Scheiding Sebastian,Wippermann Frank,Beckert Erik,Eberhardt Ramona,Tünnermann Andreas
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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