Author:
Sullivan Daniel B.,Boonstra Thomas,Kief Mark T.,Youtt Lily,Jayashankar Sethuraman,Van Dorn Carolyn,Gentile Harold,Viswanathan Sriram,Wang Dexin,Song Dion,Hong Dongsung,Gee Sung-Hoon
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. A Robotics Experience for All the Students in an Elementary School;Proceedings of the 49th ACM Technical Symposium on Computer Science Education;2018-02-21
2. Development of nanoimprint lithography templates toward high-volume manufacturing;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-02-05