High-sensitivity surface-profile measurements by heterodyne white-light interferometer
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference6 articles.
1. High-speed noncontact profiler based on scanning white-light interferometry
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4. Optical Coherence Tomography
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4. Low-coherence heterodyne interferometry using an achromatic frequency shifter based on a frequency-domain optical delay line;Applied Optics;2014-02-12
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