Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks
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SPIE
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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3. Laser Processing of Silicon Suboxide for the Fabrication of Multilevel Fused Silica Diffractive Phase Elements;Journal of Laser Micro/Nanoengineering;2018-12
4. Technology of integrating diffractive elements into an image-matrix hologram;Holography: Advances and Modern Trends II;2011-05-05
5. Fabrication of micro-lenses using excimer laser ablation by means of laser-generated grey-tone-masks;SPIE Proceedings;2010-02-11
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