<title>Polycapillary collimator for laser-generated plasma source x-ray lithography

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Polycapillary collimator for laser-generated plasma source x-ray lithography

Published:1999-11-23 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Chen Zewu,Youngman Russell,Bievenue Tom,Xiao Qi-Fan,Turcu I. C. Edmond,Grygier Robert K.,Mrowka Stanley

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Theoretical Simulation of X-Ray Transmission Through a Polycapillary X-Ray Lens With a Variable Capillary Radius;IEEE Transactions on Nuclear Science;2020-05

2. Decreasing the total divergence of polycapillary X-ray microbeams;Technical Physics Letters;2008-09

3. Polycapillary x-ray microbeams;SPIE Proceedings;2008-08-28

4. Overview of polycapillary X-ray optics;Powder Diffraction;2002-06

5. Collimated point-source x-ray nanolithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002

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