<title>Modeling of dielectric polarization during an electron beam exposure

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Modeling of dielectric polarization during an electron beam exposure

Published:2004-03-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Borisov S. S.,Grachev Eugene A.,Zaitsev S. I.,Negulyaev N. N.,Cheremukhin E. A.

Publisher

SPIE

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