Fiber optic sensor for measuring very small holes
Author:
Affiliation:
1. Tianjin Univ. (USA)
2. Physikalisch-Technische Bundesanstalt (Germany)
Publisher
SPIE
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Measurement Method for Micro-Cavity Based on Improved MAP Algorithm;Key Engineering Materials;2008-06
2. Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures;Applied Physics Letters;2007-09-17
3. Measurement Method for Micro-cavity Based on Super-resolution Restoration;Fourth International Conference on Image and Graphics (ICIG 2007);2007-08
4. Nanoscale surface measurements at sidewalls of nano- and micro-structures;Measurement Science and Technology;2007-01-12
5. Development of a virtual probe tip with an application to high aspect ratio microscale features;Review of Scientific Instruments;2005-09
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