Thermal wave dopant profiling for phosphorous ion implantation
-
Published:2005-12-28
Issue:
Volume:
Page:
-
ISSN:0277-786X
-
Container-title:Microelectronics: Design, Technology, and Packaging II
-
language:
-
Short-container-title:
Author:
Lee Kang Hai,Thanigaivelan Thirumal,Ibrahim Kamarulazizi