Author:
Yeung Michael S.,Barouch Eytan
Reference14 articles.
1. V. Bakshi, EUV Lithography (SPIE Press, Bellingham, WA, 2009).
2. B. J. Lin, Optical Lithography: Here is Why (SPIE Press, Bellingham, WA, 2010), Ch. 8.
3. A. Erdmann, T. Fuhner, P. Evanschitzky, J. T. Neumann, J. Ruoff and P. Graupner, Proc. SPIE, 8679, 8679–61 (2013).
4. J. T. Neumann, P. Graupner, W. Kaiser, R. Garreis and B. Geh, Proc. SPIE, 8679, 867915 (2013).
5. Waveguide effect in high-NA EUV lithography: The key to extending EUV lithography to the 4-nm node