1. Optical Interference Coatings
2. Coated Optics for DUV-Excimer Laser Applications;Ullmann,2000
3. Optical Lithography…40 years and holding;Burning,2007
4. Deposition and characterization of challenging DUV coatings;Kelkar,2008
5. Microstructure related properties of lanthanum fluoride films deposited by molybdenum boat evaporation at 193 nm