A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers-Reference-Cited by-同舟云学术

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A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers

Published:2019-09-09 Issue: Volume: Page:
ISSN:
Container-title:Advances in Metrology for X-Ray and EUV Optics VIII
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Author:

Grubert Bernd,Kreitschik David,Schnabel Olaf,Siewert Frank,Geckeler Ralf D.,Schumann Matthias,Just Andreas,Krause Michael,Yandayan Tanfer,Akgoz S. Asli

Publisher

SPIE

Reference15 articles.

1. On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology

2. On the characterization of a 1 m long, ultra-precise KB-focusing mirror pair for European XFEL by means of slope measuring deflectometry

3. Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

4. The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY;Siewert,2004

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry;Journal of Synchrotron Radiation;2024-06-05

2. A comparison of traceable spatial angle autocollimator calibrations performed by PTB and VTT MIKES;Metrologia;2021-12-13

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