Investigation into causes of resolution degradation in projection exposure using a gradient-index lens array
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SPIE
Reference7 articles.
1. Luminous intensity of a gradient-index lens array
2. Chromatic aberration of the Selfoc lens as an imaging system
3. Aberration improvement of Selfoc lenses
4. Novel Projection Exposure System Using Gradient-Index Lens Array
5. Directional Difference of Patterns Printed by Scan-Projection Lithography Using a Gradient Index Lens Array
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates;Japanese Journal of Applied Physics;2019-05-06
2. Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array;Journal of Photopolymer Science and Technology;2017
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